F-Ar-Ne Excimer gas

F-Ar-Ne Excimer gas

Property information

Formula

F2 Ar Ne

Application

Ar-F 193nm DUV for Lithography

Note

F2 0.9-1.0

Ar 3.40 -3.50 %

Ne Balance gas

Cylidner Size: 49L

Valve: DISS 728

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